Complete modeling of subsurface microscopy system based on aplanatic solid immersion lens

被引：13

作者：

Chen, Rui ^{[1
]}

Agarwal, Krishna ^{[1
]}

Zhong, Yu ^{[1
]}

Sheppard, Colin J. R. ^{[2
]}

Phang, Jacob C. H. ^{[1
]}

Chen, Xudong ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore

[2] Italian Inst Technol, I-16163 Genoa, Italy

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 2012年 / 29卷 / 11期

关键词：

OPTICAL-DATA STORAGE; HIGH NUMERICAL APERTURE; IMAGE-FORMATION; INTEGRATED-CIRCUITS; SPATIAL-RESOLUTION; POLARIZED-LIGHT; FIELD; LITHOGRAPHY; DIFFRACTION; PERFORMANCE;

D O I：

10.1364/JOSAA.29.002350

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A general model of a subsurface microscopy system based on an aplanatic solid immersion lens (ASIL) is presented. This model is composed of three components: generation of incident light into the ASIL, interaction of the incident light with the sample, and imaging of the scattered light. Interaction of incident light with sample can be calculated numerically using electromagnetic scattering theory, while vector diffraction theory is used to treat the other two components. Examples of imaging small and extended scatterers are shown. For small scatterers, we show the differences between the actual resolution of the whole system and the resolution predicted by considering only one subsystem of the whole system. For extended scatterers, two types of illuminations-focusing light illumination and plane wave direct illumination-are used to image the scatterers, and observations are explained using interaction of the incident light with the sample. (C) 2012 Optical Society of America

引用

页码：2350 / 2359

页数：10

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