A Novel High Q Inductor Based on Double-sided Substrate Integrated Suspended Line Technology with Patterned Substrate

被引：0

作者：

Li, Lianyue ^{[1
]}

Ma, Kaixue ^{[1
]}

Mou, Shouxian ^{[1
]}

机构：

[1] Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu, Sichuan, Peoples R China

来源：

2017 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS) | 2017年

基金：

中国国家自然科学基金;

关键词：

High quality factor; spiral inductor; substrate integrated suspended line; double-sided; patterned substrate;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel self-packaged high quality factor spiral inductor based on substrate integrated suspended line technology. Suspended substrate are hollowed in specific shape for reducing the dielectric substrate loss. Double-sided interconnected stripline is used for diminishing the metal ohmic loss. Simulation and measurement results demonstrate that the double-sided interconnected spiral inductor with patterned substrate can improve inductor quality factor up to 40%.

引用

页码：476 / 478

页数：3

共 11 条

[1]

Burghartz JN, 1995, INTERNATIONAL ELECTRON DEVICES MEETING, 1995 - IEDM TECHNICAL DIGEST, P1015, DOI 10.1109/IEDM.1995.499389

[2]

Chen YE, 2001, IEEE MTT S INT MICR, P523, DOI 10.1109/MWSYM.2001.966946

[3] S-PARAMETER-BASED IC INTERCONNECT TRANSMISSION-LINE CHARACTERIZATION [J].

EISENSTADT, WR ;

EO, YS .

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1992, 15 (04) :483-490

[4] The modeling, characterization, and design of monolithic inductors for silicon RF IC's [J].

Long, JR ;

Copeland, MA .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1997, 32 (03) :357-369

[5]

Ma K., PCT Patent, Patent No. [WO/2007/149046, 2007149046]

[6] High-performance RF coil inductors on silicon [J].

Malba, V ;

Young, D ;

Ou, JJ ;

Bernhardt, AF ;

Boser, BE .

48TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE - 1998 PROCEEDINGS, 1998, :252-255

[7]

Maloratsky LG, 2000, MICROWAVES RF, V39, P79

[8]

Ming-Jie Yu, 1999, 1999 Asia Pacific Microwave Conference. APMC'99. Microwaves Enter the 21st Century. Conference Proceedings (Cat. No.99TH8473), P686, DOI 10.1109/APMC.1999.833684

[9]

Park EC, 2003, IEEE MTT S INT MICR, P721, DOI 10.1109/MWSYM.2003.1212473

[10]

Tiwari S, 2015, 2015 IEEE ASIAN PACIFIC CONFERENCE ON POSTGRADUATE RESEARCH IN MICROELECTRONICS AND ELECTRONICS (PRIMEASIA), P94, DOI 10.1109/PrimeAsia.2015.7450477

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