Effects of GaN Buffer Resistance on the Device Performances of AlGaN/GaN HEMTs

We investigated the effects of GaN buffer resistance of AlGaN/GaN high-electron-mobility transistors (HEMTs) on direct current (DC), low-frequency noise (LFN), and pulsedI-Vcharacterization performances. The devices with the highest GaN buffer resistance were grown on sapphire substrate using two-step growth temperature method without additional compensation doping. The proposed device exhibited the degraded off-state leakage current due to the improved GaN buffer quality compared to the reference devices with relative low buffer resistance, which is confirmed by high resolution X-ray diffraction (HRXRD). However, the proposed device with deep-level defects in GaN buffer layer showed the reduced hysteresis ( increment V-th), increased breakdown voltage (BV), and enhanced pulseI-Vcharacteristics. Regardless of GaN buffer resistance, all devices clearly showed 1/fbehavior with carrier number fluctuations (CNF) at on-state but followed 1/f(2)characteristic at off-state. From the 1/f(2)noise characteristics, the extracted trap time constant (tau(i)) of the proposed device can be obtained to be 10 ms, which is shorter than those of the reference devices because of the full compensation of deep-level defects in the GaN buffer layer.