Deposition of high reflective films on deformable mirror for high power laser system

被引：6
作者：
Long, Guoyun [1 ,2 ]
Zhang, Yaoping [1 ]
Fan, Xinlong [1 ]
Zhou, Hong [1 ]
Guan, Chunlin [1 ]
机构：
[1] Chinese Acad Sci, Inst Opt & Elect, Chengdu, Peoples R China
[2] Univ Chinese Acad Sci, Beijing, Peoples R China
来源：
OPTICAL ENGINEERING | 2020年 / 59卷 / 05期
关键词：
low stress films; deformable mirror; temperature rise;
D O I：
10.1117/1.OE.59.5.057103
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
High reflective (HR) films with low stress and high damage threshold are deposited on a high-density deformable mirror (HDM) for a high-power laser system. The parameters of the laser system are about 5 J, 6 ns, and 200 Hz @ 1064 nm. The surface figure of the HDM is measured before and after coating, respectively. After coating, the surface error of HDM is only 39-nm rms, and the results show that the residual stress of HR films is very small. Then, a F50-mm sample and the HDM are tested successively in the high-power laser system. The temperature rise of the sample and HDM are measured in real-time. Finally, the temperature of HDM has risen by 10 degrees C, while the sample is changed by only 1 degrees C. (C) 2020 Society of Photo-Optical Instrumentation Engineers (SPIE)
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页数：8
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