Fabrication and Characterization of Biologically Inspired Curved-Surface Artificial Compound Eyes

被引:31
作者
He, Qing [1 ]
Liu, Jingquan [1 ]
Yang, Bin [1 ]
Dong, Yunzhao [2 ]
Yang, Chunsheng [1 ]
机构
[1] Shanghai Jiao Tong Univ, Sci & Technol Micro Nano Fabricat Lab, Res Inst Micro Nano Sci & Technol, Shanghai 200240, Peoples R China
[2] Shanghai Inst Foreign Trade, Business Informat Management Sch, Shanghai 201620, Peoples R China
基金
中国国家自然科学基金;
关键词
Curved artificial compound eyes (ACEs) (CACEs); microelectromechanical systems (MEMS); multiangle images; Parylene-C;
D O I
10.1109/JMEMS.2012.2226934
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
(Curved artificial compound eyes (CACEs) are fabricated using microscale replication, stamping, and casting processes to form deposited 2-D microlens-pattern composite films into 3-D structures. The films are made up of polydimethylsiloxane (PDMS)-Parylene-C-PDMS layers. The layers are used for pattern replication, isolation, and buffering, respectively. The effect of the buffer layer on the ultimate 3-D structure is discussed. Multiple images of the human face in lateral-and axial-motion modes are obtained by these CACE prototypes. These images are used to evaluate the capability of the CACE to acquire multiangle images. The results give evidence that CACEs can potentially produce stereovision in microoptical systems.
引用
收藏
页码:4 / 6
页数:3
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