Study of Gas Separation in Micro Devices by Solving the Boltzmann Equation

被引:5
作者
Dodulad, O. I. [1 ]
Ivanova, I. D. [1 ]
Kloss, Yu Yu [1 ,2 ]
Shuvalov, P. V. [1 ]
Tchremissine, F. G. [3 ]
机构
[1] Moscow Inst Phys & Technol, Dolgoprudnyi, Russia
[2] Kurchatov Inst, Natl Res Ctr, Moscow, Russia
[3] Dorodnicyn Computing Ctr RAS, Moscow, Russia
来源
28TH INTERNATIONAL SYMPOSIUM ON RAREFIED GAS DYNAMICS 2012, VOLS. 1 AND 2 | 2012年 / 1501卷
关键词
Micro devices; Thermal creep; Gas mixtures separation; Boltzmann equation; Numerical solution;
D O I
10.1063/1.4769626
中图分类号
V [航空、航天];
学科分类号
08 ; 0825 ;
摘要
Gas separation in thermal creep based micro devices is studied by solving the Boltzmann kinetic equation by the finite difference discrete ordinates method. The collision integral is evaluated by two alternative versions of the conservative projection method developed for gas mixtures. The advection operator of the equation is approximated by flux-preserving schemes at rectangular or unstructured grids. The influence of a molecular potential on a gas separation rate is demonstrated.
引用
收藏
页码:816 / 823
页数:8
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