Programmable Readout Circuit for Capacitive Accelerometer

被引：0

作者：

Huang Jingqing ^{[1
]}

Zhang Mingming ^{[1
]}

Chen Zhongjian ^{[1
]}

Hao Yilong ^{[1
]}

Li Haojiong ^{[1
]}

Meng Xiangyun ^{[1
]}

Lu Wengao ^{[1
]}

Zhang Yacong ^{[1
]}

Su Weiguo ^{[1
]}

Li Song ^{[1
]}

机构：

[1] Peking Univ, Dept Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China

来源：

2011 INTERNATIONAL CONFERENCE OF ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC) | 2011年

关键词：

Programmable; capacitive accelerometer; low noise; rail-to-rail; EEPROM;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A programmable readout circuit for capacitive accelerometer is presented. The inequality of initial capacitance of sensor's differential capacitor pair is properly compensated. The gain of CSA and the cut-off frequency of LPF are both adjustable. To lower noises, amplifier of CSA is carefully designed. Its equivalent input noise density is 12.7nV/root Hz. A rail-to-rail buffer is chosen to enlarge the measurement range. EEPROM instead of pads is exploited, which saves about 33 percent of the layout area.

引用

页数：2

共 5 条

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[4] A Micropower ΔΣ-Based Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer
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[J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2009, 44 (11) : 3193 - 3210
[5] A Low-Power Low-Noise Dual-Chopper Amplifier for Capacitive CMOS-MEMS Accelerometers
Sun, Hongzhi
Fang, Deyou
Jia, Kemiao
Maarouf, Fares
Qu, Hongwei
Xie, Huikai
[J]. IEEE SENSORS JOURNAL, 2011, 11 (04) : 925 - 933

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