Ba2TiO4 and Ba4Ti13O30 Thick Films Prepared by Laser Chemical Vapor Deposition and Their Microstructure

被引：1
|
作者：
Guo, Dongyun [1 ]
Ito, Akihiko [1 ]
Tu, Rong [1 ]
Goto, Takashi [1 ]
机构：
[1] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan
来源：
MATERIALS INTEGRATION | 2012年 / 508卷
关键词：
Ba2TiO5; Ba4Ti13O30; Thick film; Laser CVD; DIELECTRIC-PROPERTIES;
D O I：
10.4028/www.scientific.net/KEM.508.199
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Ba2TiO4 and Ba4Ti13O30 thick films were prepared by laser chemical vapor deposition using Ba- and Ti-dipivaloylmethanate precursors. Single-phase Ba2TiO4 thick films were obtained at 845-946 K and Ba/Ti source molar ratio 2.4. Single-phase Ba4Ti13O30 films were obtained at 944-1011 K and Ba/Ti source molar ratio 0.38. Ba2TiO4 thick films consisted of truncated grains, while Ba4Ti13O30 thick films had shellfish-like grains. Ba2TiO4 and Ba4Ti13O30 thick films showed a columnar growth and their deposition rates were 72 and 132 mu m h(-1), respectively.
引用
收藏
页码：199 / 202
页数：4
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