Laser ablation of thin films with very high induced stresses

被引:10
作者
Dömer, H [1 ]
Bostanjoglo, O [1 ]
机构
[1] Tech Univ Berlin, Inst Opt, D-10623 Berlin, Germany
关键词
D O I
10.1063/1.1462850
中图分类号
O59 [应用物理学];
学科分类号
摘要
The ablation of chromium films by nanosecond laser pulses was tracked by triple-frame high-speed transmission electron microscopy and selected area diffraction (exposure time approximate to7-11 ns, frame spacings 20 ns-10 mus). At lower fluences the films were shattered during heatup and cooldown, producing debris with huge in-plane accelerations up to 10(10) m/s(2) and rotations with 10(6) rps. At higher fluences the ablation is proceeded by a domain-patterned evaporation. These effects are responsible for the high damage in laser-produced patterns in chromium films. They were all explained as being due to stress waves, launched by an extremely fast nonthermal 3%-4% expansion/contraction of the bcc lattice constant during heating/cooling. (C) 2002 American Institute of Physics.
引用
收藏
页码:5462 / 5467
页数:6
相关论文
共 14 条
[1]  
[Anonymous], 1998, SMITHELLS METALS REF
[2]   THERMOCAPILLARY FLOW EXCITED BY FOCUSED NANOSECOND LASER-PULSES IN CONTAMINATED THIN LIQUID-IRON FILMS [J].
BALANDIN, VY ;
OTTE, D ;
BOSTANJOGLO, O .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (03) :2037-2044
[3]   SIMULATION OF TRANSFORMATIONS OF THIN METAL-FILMS HEATED BY NANOSECOND LASER-PULSES [J].
BALANDIN, VY ;
NIEDRIG, R ;
BOSTANJOGLO, O .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (01) :135-142
[4]  
DOMER H, IN PRESS MECH MAT
[5]  
IIDA T, 1988, PHYSICAL PROPERTIES
[6]   Numerical and experimental study on the thermal damage of thin Cr films induced by excimer laser irradiation [J].
Lee, SK ;
Chang, WS ;
Na, SJ .
JOURNAL OF APPLIED PHYSICS, 1999, 86 (08) :4282-4289
[7]  
MEYERS MA, 1981, SHOCK WAVES HIGH STR, P513
[8]   Imaging and modeling of pulse laser induced evaporation of metal films [J].
Niedrig, R ;
Bostanjoglo, O .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (01) :480-485
[9]   Dynamics of laser pulse-induced melts in Ni-P visualized by high-speed transmission electron microscopy [J].
Nink, T ;
Galbert, F ;
Mao, ZL ;
Bostanjoglo, O .
APPLIED SURFACE SCIENCE, 1999, 138 :439-443
[10]   Melt instability and crystallization in thin amorphous Ni-P films [J].
Nink, T ;
Mao, ZL ;
Bostanjoglo, O .
APPLIED SURFACE SCIENCE, 2000, 154 :140-145