Structural and Magnetic Properties of Sputter-Deposited Polycrystalline Ni-Mn-Ga Ferromagnetic Shape-Memory Thin Films

被引：7
作者：
Kumar, S. Vinodh [1 ]
Seenithurai, S. [1 ]
Raja, M. Manivel [2 ]
Mahendran, M. [1 ]
机构：
[1] Thiagarajar Coll Engn, Dept Phys, Smart Mat Lab, Madurai 625015, Tamil Nadu, India
[2] Def Met Res Lab, Hyderabad 500058, Andhra Pradesh, India
来源：
JOURNAL OF ELECTRONIC MATERIALS | 2015年 / 44卷 / 10期
关键词：
Thin films; sputtering; microstructure; magnetic properties; MAGNETOMECHANICAL PROPERTIES; MARTENSITIC-TRANSFORMATION; NI2MNGA; ALLOY; BEHAVIOR; STRAIN; CRYSTALLIZATION; ORIENTATION; FABRICATION; GROWTH;
D O I：
10.1007/s11664-015-3819-0
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Polycrystalline Ni-Mn-Ga ferromagnetic shape-memory thin films have been deposited on Si (100) substrates using a direct-current magnetron sputtering technique. The microstructure and the temperature dependence of magnetic properties of the films have been investigated by x-ray diffraction, scanning electron microscopy, and thermomagnetic measurements. As-deposited Ni50.2Mn30.6Ga19.2 film showed quasi-amorphous structure with paramagnetic nature at room temperature. When annealed at 873 K, the quasi-amorphous film attained crystallinity and possessed L2(1) cubic ordering with high magnetic transition temperature. Saturation magnetization and coercivity values for the annealed film were found to be 220 emu/cm(3) and 70 Oe, respectively, indicating soft ferromagnetic character with low magnetocrystalline anisotropy. The magnetic transitions of the film deposited at 100 W were above room temperature, making this a potential candidate for use in microelectromechanical system devices.
引用
收藏
页码：3761 / 3767
页数：7
相关论文
共 57 条
[1]   Magnetic properties, structure and shape-memory transitions in Ni-Mn-Ga thin films grown by ion-beam sputtering [J].
Ahn, JP ;
Cheng, N ;
Lograsso, T ;
Krishnan, KM .
IEEE TRANSACTIONS ON MAGNETICS, 2001, 37 (04) :2141-2143
[2]   Magnetocaloric effect and magnetization in a Ni-Mn-Ga Heusler alloy in the vicinity of magnetostructural transition [J].
Aliev, A ;
Batdalov, A ;
Bosko, S ;
Buchelnikov, V ;
Dikshtein, I ;
Khovailo, V ;
Koledov, V ;
Levitin, R ;
Shavrov, V ;
Takagi, T .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2004, 272 :2040-2042
[3]   Stress analysis, structure and magnetic properties of sputter deposited Ni-Mn-Ga ferromagnetic shape memory thin films [J].
Annadurai, A. ;
Raja, M. Manivel ;
Prabahar, K. ;
Kumar, Atul ;
Kannan, M. D. ;
Jayakumar, S. .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2011, 323 (22) :2797-2801
[4]   Martensitic transformation in Ni-Mn-Ga/Si(100) thin films [J].
Aseguinolaza, I. R. ;
Orue, I. ;
Svalov, A. V. ;
Wilson, K. ;
Muellner, P. ;
Barandiaran, J. M. ;
Chernenko, V. A. .
THIN SOLID FILMS, 2014, 558 :449-454
[5]   Martensitic transformation and magnetic anisotropy in Ni-Mn-Ga/NaCl(001) thin films probed by ferromagnetic resonance [J].
Aseguinolaza, I. R. ;
Golub, V. ;
Barandiaran, J. M. ;
Ohtsuka, M. ;
Mueller, P. ;
Salyuk, O. Y. ;
Chernenko, V. A. .
APPLIED PHYSICS LETTERS, 2013, 102 (18)
[6]   Fabrication conditions and transformation behavior of epitaxial Ni-Mn-Ga thin films [J].
Aseguinolaza, I. R. ;
Orue, I. ;
Svalov, A. V. ;
Chernenko, V. A. ;
Besseghini, S. ;
Barandiaran, J. M. .
JOURNAL OF MATERIALS SCIENCE, 2012, 47 (08) :3658-3662
[7]   The effect of post annealing on structure, microstructure and magnetic properties of thin Ni-Mn-Ga films [J].
Backen, Anja ;
Niemann, Robert ;
Kaufmann, Stefan ;
Buschbeck, Joerg ;
Schultz, Ludwig ;
Faehler, Sebastian .
ESOMAT 2009 - 8TH EUROPEAN SYMPOSIUM ON MARTENSITIC TRANSFORMATIONS, 2009,
[8]   Effect of substrate on processing of multi-gun sputter deposited, near-stoichiometric Ni2MnGa thin films [J].
Bayer, B. C. ;
Khan, A. F. ;
Mehmood, M. ;
Barber, Z. H. .
THIN SOLID FILMS, 2010, 518 (10) :2659-2664
[9]   Preparation of heat treated Ni2MnGa thin film without silicon diffusion [J].
Bernard, F. ;
Rousselot, C. ;
Hirsinger, L. ;
Delobelle, P. .
EUROPEAN PHYSICAL JOURNAL-SPECIAL TOPICS, 2008, 158 (1) :187-191
[10]   Microstructural, mechanical and magnetic properties of shape memory alloy Ni55Mn23Ga22 thin films deposited by radio-frequency magnetron sputtering [J].
Bernard, F. ;
Delobelle, P. ;
Rousselot, C. ;
Hirsinger, L. .
THIN SOLID FILMS, 2009, 518 (01) :399-412
123456