CCD evaluation for estimating measurement precision in lateral shearing interferometry

被引：0

作者：

Liu Bingcai ^{[1
,2
]}

Li Bing ^{[1
]}

Tian Ailing ^{[2
]}

Li Baopeng ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, 28 Xianning West Rd, Xian 710049, Shaanxi, Peoples R China

[2] Xian Technol Univ, Shaanxi Province Key Lab Thin Films Technol & Opt, Xian 710032, Peoples R China

来源：

INTERNATIONAL CONFERENCE ON OPTICS IN PRECISION ENGINEERING AND NANOTECHNOLOGY (ICOPEN2013) | 2013年 / 8769卷

基金：

中国国家自然科学基金;

关键词：

shearing interferometry; pixel resolution; gray scale; simulation; VIBRATION ANALYSIS;

D O I：

10.1117/12.2019073

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Because of larger measurement ability of wave-front deviation and no need of reference plat, the lateral shearing interferometry based on four step phase shifting has been widely used for wave-front measurement. After installation shearing interferograms are captured by CCD camera, and the actual phase data of wave-front can be calculated by four step phase shift algorithm and phase unwrapping. In this processing, the pixel resolution and gray scale of CCD camera is the vital factor for the measurement precision. In this paper, Based on the structure of lateral shearing surface interferometer with phase shifting, pixel resolution more or less for measurement precision is discussed. Also, the gray scale is 8 bit, 12 bit or 16 bit for measurement precision is illustrated by simulation.

引用

页数：6

共 13 条

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[2]

GUO Xiaoxian, 2009, P SPIE, V7160

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