FRICTIONAL BEHAVIOR OF MICRO/NANOTEXTURED SURFACES INVESTIGATED BY ATOMIC FORCE MICROSCOPE: A REVIEW

Tribological issues between friction pair are fundamental problems for minimized devices because of their higher surface-to-volume ratio. Micro/nanotexturing is an effective technique to reduce actual contact area between contact pair at the nanoscale. Micro/nanotexture made a great impact on the frictional behavior of textured surfaces. This paper summarizes the recent advancements in the field of frictional behavior of micro/nanotextured surfaces, which are based on solid surface contact in atmosphere environment, especially focusing on the factors influencing the frictional behavior: Surface property, texturing density, texturing height, texturing structure and size of contact pair (atomic force microscope (AFM) tip) and texturing structures. Summarizing the effects of these factors on the frictional behavior is helpful for the understanding and designing of the surfaces in sliding micro/nanoelectromechanical systems (MEMS/NEMS). Controlling and reducing the friction force in moving mechanical systems is very important for the performance and reliability of nanosystems, which contribute to a sustainable future.