SOICMOS-based smart gas sensor system for ubiquitous sensor networks

被引：26

作者：

Maeng, Sunglyul ^{[2
]}

Guha, Prasanta ^{[1
]}

Udrea, Florin ^{[1
]}

Ali, Syed Z. ^{[1
]}

Santra, Sumita ^{[1
]}

Gardner, Julian ^{[3
]}

Park, Jonghyurk ^{[2
]}

Kim, Sang-Hyeob ^{[2
]}

Moon, Seung Eon ^{[2
]}

Park, Kang-Ho ^{[2
]}

Kim, Jong-Dae

Choi, Youngjin ^{[1
]}

Milne, William I. ^{[1
]}

机构：

[1] Univ Cambridge, Ctr Adv Photon & Elect, Cambridge, England

[2] EFRI, Convergence Components & Mat Res Lab, Taejon, South Korea

[3] Univ Warwick, Sch Engn, Coventry CV4 7AL, W Midlands, England

来源：

ETRI JOURNAL | 2008年 / 30卷 / 04期

关键词：

SOICMOS-based gas sensor platform technology; USN; micro-hotplate; ZnO nanorods; NO2 gas sensing;

D O I：

10.4218/etrij.08.0108.0101

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at 200 degrees C and showed a good response to 100 ppb NO2 gas.

引用

页码：516 / 525

页数：10

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