Doping effect of SnO2 on gas sensing characteristics of sputtered ZnO thin film chemical sensor

被引：27

作者：

Nanto, H

Morita, T

Habara, H

Kondo, K

Douguchi, Y

Minami, T

机构：

[1] KANAZAWA INST TECHNOL,ADV MAT SCI RES & DEV CTR,NONOICHI,ISHIKAWA 921,JAPAN

[2] IND RES INST ISHIKAWA,KANAZAWA,ISHIKAWA 92002,JAPAN

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 36卷 / 1-3期

关键词：

doping effect; SnO2; gas sensor; sputtered ZnO thin film chemical sensor;

D O I：

10.1016/S0925-4005(97)80101-3

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The SnO2 content dependence of the sensitivity of sputtered SnO2-doped ZnO thin film chemical sensor is studied for various gases. It is found that the SnO2(78 wt%)-doped ZnO thin film chemical sensor exhibits a high sensitivity and good selectivity for C2H5OH gas. The sensitivity of the SnO2(78 wt%)-doped ZnO thin film chemical sensor responds to the freshness change of alcohols, indicating that the sensor is useful for freshness detection of alcohols.

引用

页码：384 / 387

页数：4

共 6 条

[1] ODOR SENSING BY SEMICONDUCTOR-METAL OXIDES
EGASHIRA, M
SHIMIZU, Y
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1993, 13 (1-3) : 443 - 446
[2] Ikegami A., 1985, TRANSDUCERS '85. 1985 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers (Cat. No.85CH2127-9), P136
[3] HIGHLY TRANSPARENT AND CONDUCTIVE ZINC-STANNATE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
MINAMI, T
SONOHARA, H
TAKATA, S
SATO, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1994, 33 (12A): : L1693 - L1696
[4] Nanto H., 1991, TRANSDUCERS '91. 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers (Cat. No.91CH2817-5), P596, DOI 10.1109/SENSOR.1991.148948
[5] NANTO H, 1995, 1995 INT CHEM 5 C PA
[6] SHEN YS, 1993, SENSOR ACTUAT B-CHEM, V12, P5, DOI 10.1016/0925-4005(93)85003-S

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