Design and Fabrication of an improved MEMS-based Piezoresistive Pressure Sensor

被引：5

作者：

Song, Zijun ^{[1
]}

Wang, Xiang ^{[1
]}

Li, Yan ^{[1
]}

San, Haisheng ^{[1
,2
]}

Yu, Yuxi ^{[3
]}

机构：

[1] Xiamen Univ, Dept Mech & Elect Engn, Sch Phys & Mech & Elect Engn, Xiamen 361005, Peoples R China

[2] Xiamen Univ, Pen Tung Sah Inst Micro Nano Sci & Technol, Xiamen 361005, Peoples R China

[3] Xiamen Univ, Coll Mat, Dept Mat Sci & Engn, Key Lab Adv Mat, Xiamen 361005, Peoples R China

来源：

ADVANCED COMPOSITE MATERIALS, PTS 1-3 | 2012年 / 482-484卷

基金：

中国国家自然科学基金;

关键词：

MEMS; piezoresistive pressure sensor; harsh environment; HARSH ENVIRONMENT;

D O I：

10.4028/www.scientific.net/AMR.482-484.318

中图分类号：

TB33 [复合材料];

学科分类号：

摘要：

An improved piezoresistive pressure sensor is designed for harsh environment application. The highlight of this design is that the Wheatstone bridge circuit is put in lower surface of pressure diaphragm and sealed in the vacuum pressure cavity. The bridge circuit is led out by embedded Al electrodes on bonding surface. ANSYS software has been used to analyze the stress distribution of the diaphragm. By using the MEMS technology, the pressure sensor with the dimension of 1.5mmx1.5mmx500 mu m is fabricated. The performance of piezoresistive pressure sensor, including output, sensitivity, and nonlinearity, are investigated. The test results show that sensitivity is 20mV/V-MPa and maximum nonlinearity is 2.73%, which meet the requirements for the modern industry.

引用

页码：318 / +

页数：2

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