Design and simulation of structurally decoupled 4-DOF MEMS vibratory gyroscope

被引：3
|
作者：
Jain, Ankush [1 ]
Gopal, Ram [1 ]
机构：
[1] Cent Elect Engn Res Inst, CSIR, MEMS & Microsensors Grp, Pilani 333031, Rajasthan, India
来源：
2013 26TH INTERNATIONAL CONFERENCE ON VLSI DESIGN AND 2013 12TH INTERNATIONAL CONFERENCE ON EMBEDDED SYSTEMS (VLSID) | 2013年
关键词：
4-DOF vibratory gyroscope; simulation; UV-LIGA; MICROMACHINED GYROSCOPES;
D O I：
10.1109/VLSID.2013.218
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents design of a structurally decoupled 4-DOF MEMS vibratory gyroscope with increased robustness and gain. The proposed design utilizes dynamic amplification in 2-DOF drive mode oscillator and 2-DOF sense mode oscillator to achieve large gain. The device performance is verified through system level simulations in CoventorWare (R) ARCHITECT3D (SABER) platform, considering 10 mu m thick nickel as structural layer. A wide operational bandwidth of 704 Hz is achieved. Moreover to verify the device performance under the application of angular velocity, a rate table simulation is carried out which resulted in sense mass displacement of 136.2 nm corresponding to the rotation induced Coriolis force at actuation voltage of 20 V-ac and 40 V-dc with angular rotation of 35 rad/s.
引用
收藏
页码：380 / 385
页数：6
相关论文
共 50 条
  • [1] Design and Simulation of a 4-DoF Vibratory Gyroscope
    Konara, K. M. T. M. B.
    Amarasinghe, Y. W. R.
    MORATUWA ENGINEERING RESEARCH CONFERENCE (MERCON 2021) / 7TH INTERNATIONAL MULTIDISCIPLINARY ENGINEERING RESEARCH CONFERENCE, 2021, : 728 - 733
  • [2] DESIGN, SIMULATION, AND FABRICATION OF SILICON-ON-INSULATOR MEMS VIBRATORY DECOUPLED GYROSCOPE
    Verma, P.
    Pavelyev, V. S.
    Volodkin, B. O.
    Tukmakov, K. N.
    Reshetnikov, A. S.
    Andreeva, T. V.
    Fomchenkov, S. A.
    Khonina, S. N.
    COMPUTER OPTICS, 2016, 40 (05) : 668 - 673
  • [3] Modeling and Simulation of the MEMS Vibratory Gyroscope
    Patel, Chandradip
    McCluskey, Patrick
    2012 13TH IEEE INTERSOCIETY CONFERENCE ON THERMAL AND THERMOMECHANICAL PHENOMENA IN ELECTRONIC SYSTEMS (ITHERM), 2012, : 928 - 933
  • [4] Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances
    M. Mubasher Saleem
    Shafaat A. Bazaz
    Microsystem Technologies, 2011, 17 : 1381 - 1391
  • [5] Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances
    Saleem, M. Mubasher
    Bazaz, Shafaat A.
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2011, 17 (08): : 1381 - 1391
  • [6] Design and simulation of a dual-axis sensing decoupled vibratory wheel gyroscope
    Tsai, DH
    Fang, W
    SENSORS AND ACTUATORS A-PHYSICAL, 2006, 126 (01) : 33 - 40
  • [7] Design and simulation of a novel 3-DOF MEMS convective gyroscope
    Dau, Van Thanh
    Dinh, Thien Xuan
    Dao, Dzung Viet
    Sugiyama, Susumu
    IEEJ Transactions on Sensors and Micromachines, 2008, 128 (05) : 219 - 224
  • [8] Design on the Driving Mode of MEMS Vibratory Gyroscope
    Yi, Ranran
    Han, Bangcheng
    Sheng, Wei
    INTELLIGENT ROBOTICS AND APPLICATIONS, PT II, PROCEEDINGS, 2008, 5315 : 232 - 239
  • [9] Design, damping estimation and experimental characterization of decoupled 3-DoF robust MEMS gyroscope
    Riaz, Kashif
    Bazaz, Shafaat A.
    Saleem, M. Mubasher
    Shakoor, Rana I.
    SENSORS AND ACTUATORS A-PHYSICAL, 2011, 172 (02) : 523 - 532
  • [10] DESIGN AND IMPLEMENTATION OF A FULLY-DECOUPLED TUNING FORK (FDTF) MEMS VIBRATORY GYROSCOPE FOR ROBUSTNESS IMPROVEMENT
    Lee, Feng-Yu
    Liang, Kai-Chih
    Cheng, Emerson
    Fang, Weileun
    2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015, : 1160 - 1163
12345