Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their actuation by electro-osmotic flow

This paper describes a procedure for rapidly and conveniently prototyping microfluidic devices that are useful with aqueous solutions. A design (with diameters of channels greater than or equal to 20 mu m) is created in a computer-aided design program and printed at high resolution on a transparency. This transparency is used as a mask in photolithography to create a master in positive relief photoresist: casting poly(dimethyl siloxane) (PDMS)against this master yields a polymeric replica containing a network of bas-relief channels. The channels are closed and sealed irreversibly by oxidizing the replica and another flat substrate (PDMS, glass, silicon, silicon oxide) in an oxygen plasma and bringing the two surfaces into conformal contact. Oxidation of the polymer allows the formation of a seal without using adhesives: it also generates channels that support electro-osmotic flow (EOF) and fill easily with aqueous solutions. Two microfluidic devices-a fluidic switch and a side channel flow controller-have been fabricated using this rapid prototyping methodology. These devices were tested using aqueous solutions as the test fluid and actuated by EOF.