Evaluation of subsurface damage by light scattering techniques

被引：46

作者：

Trost, Marcus ^{[1
,2
]}

Herffurth, Tobias ^{[1
,2
]}

Schmitz, David ^{[1
]}

Schroeder, Sven ^{[1
]}

Duparre, Angela ^{[1
]}

Tuennermann, Andreas ^{[1
,2
]}

机构：

[1] Fraunhofer Inst Appl Opt & Precis Engn, D-07745 Jena, Germany

[2] Univ Jena, Inst Appl Phys, Abbe Ctr Photon, D-07743 Jena, Germany

来源：

APPLIED OPTICS | 2013年 / 52卷 / 26期

关键词：

FUSED-SILICA; SURFACE CHARACTERIZATION; ROUGHNESS; POLARIZATION; ULTRAVIOLET; CRYSTAL; FILM;

D O I：

10.1364/AO.52.006579

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Subsurface damage (SSD) in optical components is almost unavoidably caused by mechanical forces involved during grinding and polishing and can be a limiting factor, in particular for applications that require high laser powers or an extreme material strength. In this paper, we report on the characterization of SSD in ground and polished optical surfaces, using different light scattering measurement techniques in the visible and extreme ultraviolet spectral ranges. The materials investigated include fused silica, borosilicate glass, and calcium fluoride. The scattering results are directly linked to classical destructive SSD characterization techniques, based on white light interferometry, optical microscopy, and atomic force microscopy of the substrate topography and cross sections obtained after etching in hydrofluoric acid and fracturing. (c) 2013 Optical Society of America

引用

页码：6579 / 6588

页数：10

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