Ultrasonic microscopy system performance calibration technology

被引：0

作者：

Wang, Qiu-tao ^{[1
]}

Xu, Chun-guang ^{[1
]}

Zhu, Yan-ling ^{[1
]}

Yang, Chao ^{[1
]}

He, Lei ^{[1
]}

机构：

[1] Beijing Inst Technol, Sch Mech Engn, Beijing 100081, Peoples R China

来源：

PROCEEDINGS OF 2019 FAR EAST NDT NEW TECHNOLOGY & APPLICATION FORUM (FENDT) | 2019年

基金：

中国国家自然科学基金;

关键词：

ultrasonic microscopy system; performance; calibration;

D O I：

10.1109/fendt47723.2019.8962731

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This article describes how to calibrate and compensate the performance of an ultrasonic microscopy system. Starting from the ultrasonic characteristics and ultrasonic transducers, the factors affecting the detection performance of the ultrasonic microscopy system were analyzed, and the calibration methods for the lateral and vertical detection dimensional accuracy were proposed respectively. The compensation method of detection performance was studied by learning the source of error. In the experiments, lateral and vertical dimension detection calibration blocks were fabricated and tested, and the calibration results were obtained.

引用

页码：105 / 109

页数：5