Direct fabrication of seamless roller molds with gapless and shaped-controlled concave microlens arrays

被引：36

作者：

Du, Guangqing ^{[1
,2
]}

Yang, Qing ^{[1
,2
]}

Chen, Feng ^{[1
,2
]}

Liu, Hewei ^{[1
,2
]}

Deng, Zefang ^{[1
,2
]}

Bian, Hao ^{[1
,2
]}

He, Shengguan ^{[1
,2
]}

Si, Jinhai ^{[1
,2
]}

Meng, Xiangwei ^{[1
,2
]}

Hou, Xun ^{[1
,2
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Sch Elect & Informat Engn, Xian 710049, Peoples R China

[2] Xi An Jiao Tong Univ, Key Lab Photon Technol Informat Shaanxi Prov, Sch Elect & Informat Engn, Xian 710049, Peoples R China

来源：

OPTICS LETTERS | 2012年 / 37卷 / 21期

基金：

美国国家科学基金会; 国家高技术研究发展计划(863计划);

关键词：

FEMTOSECOND-LASER; GLASSES;

D O I：

10.1364/OL.37.004404

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This Letter demonstrates the direct fabrication of gapless concave microlenses on glass cylinders, which can be used as seamless roller molds for the continuous imprinting of large-area microlens arrays. The method involves femtosecond laser exposures followed by a chemical wet-etching process. A honeycomb-like concave microlens array was fabricated on a glass cylinder with a diameter of 3 mm. We demonstrated the flexibility of the method in tuning the shape and depth of the concave structures by the arrangements of the laser exposure spots and laser powers, and examined the replicating ability of the roller mold by the polymer castling method. (C) 2012 Optical Society of America

引用

页码：4404 / 4406

页数：3

共 16 条

[1] High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates [J].

Ahn, Se Hyun ;

Guo, L. Jay .

ADVANCED MATERIALS, 2008, 20 (11) :2044-+

[2] Fabrication of Flexible Binary Amplitude Masks for Patterning on Highly Curved Surfaces [J].

Bowen, Audrey M. ;

Nuzzo, Ralph G. .

ADVANCED FUNCTIONAL MATERIALS, 2009, 19 (20) :3243-3253

[3] Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method [J].

Chen, Feng ;

Liu, Hewei ;

Yang, Qing ;

Wang, Xianhua ;

Hou, Cong ;

Bian, Hao ;

Liang, Weiwei ;

Si, Jinhai ;

Hou, Xun .

OPTICS EXPRESS, 2010, 18 (19) :20334-20343

[4]

Feng H., 2011, J PHYS D, V44

[5] Laser-matter interaction in the bulk of a transparent solid: Confined microexplosion and void formation [J].

Gamaly, Eugene G. ;

Juodkazis, Saulius ;

Nishimura, Koichi ;

Misawa, Hiroaki ;

Luther-Davies, Barry .

PHYSICAL REVIEW B, 2006, 73 (21)

[6] Fabrication of Seamless Roller Mold for Continuous Roller Imprinting of Microlens Array Films [J].

Lee, Yung-Chun ;

Chen, Hong-Wei ;

Hsiao, Fei-Bin .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 21 (02) :316-323

[7] Hexagonal microlens array modeling and fabrication using a thermal reflow process [J].

Lin, CP ;

Yang, HS ;

Chao, CK .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (05) :775-781

[8] Photoetching of spherical microlenses on glasses using a femtosecond laser [J].

Liu, Hewei ;

Chen, Feng ;

Wang, Xianhua ;

Yang, Qing ;

Zhang, Dongshi ;

Si, Jinhai ;

Hou, Xun .

OPTICS COMMUNICATIONS, 2009, 282 (20) :4119-4123

[9] MICROJET FABRICATION OF MICROLENS ARRAYS [J].

MACFARLANE, DL ;

NARAYAN, V ;

TATUM, JA ;

COX, WR ;

CHEN, T ;

HAYES, DJ .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (09) :1112-1114

[10] Control of microstructure shape and morphology in femtosecond laser ablation of imprint rollers [J].

Wang, Wenjun ;

Mei, Xuesong ;

Jiang, Gedong .

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2009, 41 (5-6) :504-512

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