Band gap shift in the GaN/AlN multilayers on the mesh-patterned Si(111)

被引:7
作者
Chen, CH
Yeh, CM
Hwang, J [1 ]
Tsai, TL
Chiang, CH
Chang, CS
Chen, TP
机构
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 30043, Taiwan
[2] Untied Epitaxy Co, Hsinchu 30043, Taiwan
关键词
D O I
10.1063/1.2193043
中图分类号
O59 [应用物理学];
学科分类号
摘要
The band gap shift in the 80x80 mu m(2) crack-free GaN/AlN multilayers on the mesh-patterned Si(111) has been characterized by cathodoluminescence (CL) and Raman techniques. The GaN band gap derived from CL spectra depends on the spatial point inside a mesh, which changes from 3.413 eV (at center) to 3.418 eV (at edge) and to 3.426 eV (at corner). The band gap shift is attributed to the variation of tensile stress inside the mesh, confirmed by Raman mapping. The shift of GaN band gap per unit stress is determined to be 0.03 eV/GPa. (c) 2006 American Institute of Physics.
引用
收藏
页数:3
相关论文
共 21 条
[1]   METALORGANIC VAPOR-PHASE EPITAXIAL-GROWTH OF A HIGH-QUALITY GAN FILM USING AN AIN BUFFER LAYER [J].
AMANO, H ;
SAWAKI, N ;
AKASAKI, I ;
TOYODA, Y .
APPLIED PHYSICS LETTERS, 1986, 48 (05) :353-355
[2]   MICROSTRUCTURES OF GAN FILMS DEPOSITED ON (001) AND (111) SI SUBSTRATES USING ELECTRON-CYCLOTRON-RESONANCE ASSISTED MOLECULAR-BEAM EPITAXY [J].
BASU, SN ;
LEI, T ;
MOUSTAKAS, TD .
JOURNAL OF MATERIALS RESEARCH, 1994, 9 (09) :2370-2378
[3]   Stress relaxation in the GaN/AlN multilayers grown on a mesh-patterned Si(111) substrate [J].
Chen, CH ;
Yeh, CM ;
Hwang, J ;
Tsai, TL ;
Chiang, CH ;
Chang, CS ;
Chen, TP .
JOURNAL OF APPLIED PHYSICS, 2005, 98 (09)
[4]  
Dadgar A, 2001, PHYS STATUS SOLIDI A, V188, P155, DOI 10.1002/1521-396X(200111)188:1<155::AID-PSSA155>3.0.CO
[5]  
2-P
[6]   Bright blue electroluminescence from an InGaN/GaN multiquantum-well diode on Si(111):: Impact of an AlGaN/GaN multilayer [J].
Dadgar, A ;
Christen, J ;
Riemann, T ;
Richter, S ;
Bläsing, J ;
Diez, A ;
Krost, A ;
Alam, A ;
Heuken, M .
APPLIED PHYSICS LETTERS, 2001, 78 (15) :2211-2213
[7]   Growth of GaN free from cracks on a (111)Si substrate by selective metalorganic vapor-phase epitaxy [J].
Honda, Y ;
Kuroiwa, Y ;
Yamaguchi, M ;
Sawaki, N .
APPLIED PHYSICS LETTERS, 2002, 80 (02) :222-224
[8]   GaN growth on Si(111) substrate using oxidized AlAs as an intermediate layer [J].
Kobayashi, NP ;
Kobayashi, JT ;
Dapkus, PD ;
Choi, WJ ;
Bond, AE ;
Zhang, X ;
Rich, DH .
APPLIED PHYSICS LETTERS, 1997, 71 (24) :3569-3571
[9]   THERMAL-STRESS IN GAN EPITAXIAL LAYERS GROWN ON SAPPHIRE SUBSTRATES [J].
KOZAWA, T ;
KACHI, T ;
KANO, H ;
NAGASE, H ;
KOIDE, N ;
MANABE, K .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (09) :4389-4392
[10]   VAPOR-PHASE EPITAXIAL-GROWTH OF ZNS ON GAP [J].
MATSUDA, N ;
AKASAKI, I .
JOURNAL OF CRYSTAL GROWTH, 1978, 45 (01) :192-197