Self-similarity and finite-size effects in nano-indentation of highly cross-linked polymers

被引:12
作者
Altebaeumer, T. [1 ]
Gotsmann, B. [1 ]
Knoll, A. [1 ]
Cherubini, G. [1 ]
Duerig, U. [1 ]
机构
[1] IBM Corp, Zurich Res Lab, CH-8803 Ruschlikon, Switzerland
关键词
D O I
10.1088/0957-4484/19/47/475301
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The scalability of thermomechanical polymer deformations in the sub-10 nm regime is of particular importance for nano-imprint techniques, hardness measurements of thin films by nano-indentations, and scanning-probe-based thermomechanical data storage. We investigate nano-indentation in the sub-10 nm regime performed on highly cross-linked polymer films of different thicknesses. It is shown that the lateral and vertical geometric characteristics of the indents independently scale down to an indent depth of 1 nm and that the scaling parameters are functions of the film thickness and the temperature of the indenter. However, in the limit of shallow indents the scaling of the cross-coupling between lateral and vertical dimensions is lost. It is argued that the breakdown of self-similarity is due to a minimum strain requirement originating from the co-operative nature of the polymer response induced by a transitions which lock the indent in the deformed state. The results shed new light on the fundamental processes and size effects involved in nanoscale plastic replication, in general.
引用
收藏
页数:11
相关论文
共 46 条
[1]  
ALTEBAEUMER T, 2008, UNPUB
[2]   PLASTIC-DEFORMATION IN GLASSY-POLYMERS BY ATOMISTIC AND MESOSCOPIC SIMULATIONS [J].
ARGON, AS ;
BULATOV, VV ;
MOTT, PH ;
SUTER, UW .
JOURNAL OF RHEOLOGY, 1995, 39 (02) :377-399
[3]   ENERGY-DISSIPATION DURING NANOSCALE INDENTATION OF POLYMERS WITH AN ATOMIC-FORCE MICROSCOPE [J].
BOSCHUNG, E ;
HEUBERGER, M ;
DIETLER, G .
APPLIED PHYSICS LETTERS, 1994, 64 (26) :3566-3568
[4]   Nano-indentation of polymeric surfaces [J].
Briscoe, BJ ;
Fiori, L ;
Pelillo, E .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (19) :2395-2405
[5]   Nanomechanical properties of polymer thin films measured by force-distance curves [J].
Cappella, B. ;
Silbernagl, D. .
THIN SOLID FILMS, 2008, 516 (08) :1952-1960
[6]   Using AFM force-distance curves to study the glass-to-rubber transition of amorphous polymers and their elastic-plastic properties as a function of temperature [J].
Cappella, B ;
Kaliappan, SK ;
Sturm, H .
MACROMOLECULES, 2005, 38 (05) :1874-1881
[7]   Numerical study on the measurement of thin film mechanical properties by means of nanoindentation [J].
Chen, X ;
Vlassak, JJ .
JOURNAL OF MATERIALS RESEARCH, 2001, 16 (10) :2974-2982
[8]   Imprint lithography with 25-nanometer resolution [J].
Chou, SY ;
Krauss, PR ;
Renstrom, PJ .
SCIENCE, 1996, 272 (5258) :85-87
[9]   IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS [J].
CHOU, SY ;
KRAUSS, PR ;
RENSTROM, PJ .
APPLIED PHYSICS LETTERS, 1995, 67 (21) :3114-3116
[10]  
Crawford E, 1998, J POLYM SCI POL PHYS, V36, P1371, DOI 10.1002/(SICI)1099-0488(199806)36:8<1371::AID-POLB11>3.0.CO