A SEM study of nanosized metal films and metal nanoparticles obtained by magnetron sputtering

被引：153

作者：

Kashin, A. S. ^{[1
]}

Ananikov, V. P. ^{[1
]}

机构：

[1] Russian Acad Sci, ND Zelinsky Inst Organ Chem, Moscow 119991, Russia

来源：

RUSSIAN CHEMICAL BULLETIN | 2011年 / 60卷 / 12期

基金：

俄罗斯基础研究基金会;

关键词：

nanoparticles; nanofilms; magnetron sputtering; scanning electron microscopy; MORPHOLOGY;

D O I：

10.1007/s11172-011-0399-x

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Magnetron sputtering was successfully used to obtain nanosized metal films and metal nanoparticles, which can be useful for development of novel methods in organic chemistry. The morphology of the nanosized (5-100 nm) objects obtained was examined by SEM. The pattern of dependence of the morphology and size of the nanosized objects on the nature of the support surface, the metal, and the sputtering conditions is described.

引用

页码：2602 / 2607

页数：6

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