Impedance matching in RF excited fast axial flow CO2 laser: The role of the capacitance due to laser head

被引：36

作者：

Bhagat, M. S. ^{[1
]}

Biswas, A. K. ^{[2
]}

Rana, L. B. ^{[1
]}

Kukreja, L. M. ^{[1
]}

机构：

[1] Raja Ramanna Ctr Adv Technol, Laser Mat Proc Div, Indore 452013, India

[2] Raja Ramanna Ctr Adv Technol, Indus Synchrotron Utilizat Div, Indore 452013, India

来源：

OPTICS AND LASER TECHNOLOGY | 2012年 / 44卷 / 07期

关键词：

Impedance matching; RF excitation; CO2; laser; DISCHARGE;

D O I：

10.1016/j.optlastec.2012.02.035

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Impedance matching in an indigenously developed 2 kW RF-excited fast axial flow (RF-FAF) CO2 laser was seen to be significantly influenced by the capacitance formed between the laser head and the electrodes. We find in the published literature that this capacitance is generally assumed to be negligible while designing the matching network in the RF-FAF CO2 lasers. It is shown that this capacitance could have a significant value and consequently would modify the design of the matching network remarkably for a specific laser design studied in the present case. The widely used discharge load model for capacitively coupled RF (CCRF) discharge excited CO2 laser plasma is extended to include this capacitance. The method of measurement of this capacitance using a bridge and the ANSYS software based simulation of its formation due to the laser head structure are discussed. (c) 2012 Elsevier Ltd. All rights reserved.

引用

页码：2217 / 2222

页数：6

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