共 15 条
[2]
BRANEBJERG J, 1995, P MEMS 96 12 15 FEBR
[3]
DOPPER J, 1996, P MME 96
[4]
DOPPER J, 1996, P ACTUATOR 96
[5]
Ehrfeld W, 1996, DECH MONOG, V132, P1
[6]
DEEP X-RAY-LITHOGRAPHY FOR THE PRODUCTION OF 3-DIMENSIONAL MICROSTRUCTURES FROM METALS, POLYMERS AND CERAMICS
[J].
RADIATION PHYSICS AND CHEMISTRY,
1995, 45 (03)
:349-365
[7]
Fruchtel J. S., 1996, ANGEW CHEM, V108, P19
[8]
HESSEL V, 1995, P INT S MICR INT MAT, P45
[9]
Lerou JJ, 1996, DECH MONOG, V132, P51
[10]
LINDER G, 1994, TAG S MIKR ACHEMA 94