Single-shot parallel four-step phase shifting using on-axis Fizeau interferometry

被引：71

作者：

Abdelsalam, D. G. ^{[1
,2
,3
]}

Yao, Baoli ^{[1
]}

Gao, Peng ^{[1
]}

Min, Junwei ^{[1
]}

Guo, Rongli ^{[1
]}

机构：

[1] Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China

[2] Natl Inst Stand, Engn & Surface Metrol Lab, El Haram, El Giza, Egypt

[3] Chonbuk Natl Univ, Div Mech Syst Engn, Jeonju 561756, South Korea

来源：

APPLIED OPTICS | 2012年 / 51卷 / 20期

关键词：

DIGITAL HOLOGRAPHY; POLARIZING SEPARATION; PAIR;

D O I：

10.1364/AO.51.004891

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The purposes of the paper are threefold: (1) to show the possibility to perform parallel phase-shifting Fizeau interferometry by using a quarter waveplate with high flatness as a reference, (2) to present a comparative study between the phase-shifting algorithm and the off-axis geometry in surface micro-topography measurement, and (3) to show the advantages of using the proposed common path Fizeau interferometry over the quasi-common path Michelson interferometry in terms of accuracy in measurement. The compelling advantage of the proposed parallel phase-shifting Fizeau interferometric technique is the long-term stability that leads to measuring objects with a high degree of accuracy. (C) 2012 Optical Society of America

引用

页码：4891 / 4895

页数：5

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