A Viscoelastic Model for the Rate Effect in Transfer Printing

被引:36
作者
Cheng, H. [1 ,2 ]
Li, M. [3 ]
Wu, J. [4 ,5 ]
Carlson, A. [6 ,7 ,8 ]
Kim, S. [9 ]
Huang, Y. [1 ,2 ]
Kang, Z. [3 ]
Hwang, K. -C. [5 ,10 ]
Rogers, J. A. [6 ,7 ,8 ]
机构
[1] Northwestern Univ, Dept Mech Engn, Evanston, IL 60208 USA
[2] Northwestern Univ, Dept Civil & Environm Engn, Evanston, IL 60208 USA
[3] Dalian Univ Technol, State Key Lab Struct Anal Ind Equipment, Dalian 116024, Peoples R China
[4] Tsinghua Univ, Dept Engn Mech, Beijing 100084, Peoples R China
[5] Tsinghua Univ, Ctr Mech & Mat, Beijing 100084, Peoples R China
[6] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[7] Univ Illinois, Mat Res Lab, Urbana, IL 61801 USA
[8] Univ Illinois, Beckman Inst, Urbana, IL 61801 USA
[9] Univ Illinois, Dept Mech Sci & Engn, Urbana, IL 61801 USA
[10] Tsinghua Univ, Dept Engn Mech, AML, Beijing 100084, Peoples R China
来源
JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME | 2013年 / 80卷 / 04期
基金
美国国家科学基金会;
关键词
transfer printing; viscoelasticity; interfacial fracture toughness; pulling speed; pull-off force; DECAL TRANSFER LITHOGRAPHY; ELASTOMERIC SURFACES; REVERSIBLE ADHESION; CRACK INITIATION; SOFT LITHOGRAPHY; FRACTURE; GROWTH; FILM; POLY(DIMETHYLSILOXANE); MECHANICS;
D O I
10.1115/1.4007851
中图分类号
O3 [力学];
学科分类号
08 ; 0801 ;
摘要
Transfer printing is a volatile tool to retract micro devices from a donor substrate via elastomeric stamps, from which the devices are grown or fabricated, followed by printing to a receiver substrate where the device is assembled to an array for integration in various applications. Among the five approaches of transfer printing summarized in the paper, the viscoelastic property of stamps is widely adopted to modulate the interfacial adhesion between the stamp and devices by applying different pulling speeds. A viscoelastic model for transfer printing is analytically established. It shows that the interfacial adhesion increases with pulling speed, which is verified by the experiments and numerical simulations.
引用
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页数:5
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