Design of Bragg Grating Sensors Based on Submicrometer Optical Rib Waveguides in SOI

被引：39
作者：
Passaro, Vittorio M. N. [1 ]
Loiacono, Renzo [2 ]
D'Amico, Giuseppe [1 ]
De Leonardis, Francesco [3 ]
机构：
[1] Politecn Bari, Dipartimento Elettrotecn & Elettron, Photon Res Grp, I-70125 Bari, Italy
[2] Univ Surrey, Adv Technol Inst, Guildford GU2 7XH, Surrey, England
[3] Politecn Bari, Dipartimento Ingn Ambiente & Sviluppo Sostenibile, Photon Res Grp, I-74100 Bari, Italy
来源：
IEEE SENSORS JOURNAL | 2008年 / 8卷 / 9-10期
关键词：
Bragg grating; integrated optics; optical sensors; silicon photonics; silicon-on-insulator (SOI);
D O I：
10.1109/JSEN.2008.929068
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10(-4) refractive index unit has been calculated for a 173-mu m-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated.
引用
收藏
页码：1603 / 1611
页数：9
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