Structure and mechanical properties of W-Se-C/diamond-like carbon and W-Se/diamond-like carbon bi-layer coatings prepared by pulsed laser deposition

被引：53
作者：
Fominski, V. Yu. [1 ]
Grigoriev, S. N. [2 ]
Celis, J. P. [3 ]
Romanov, R. I. [1 ]
Oshurko, V. B. [2 ]
机构：
[1] Natl Res Nucl Univ MEPhI, Moscow 115409, Russia
[2] Moscow State Univ Technol STANKIN, Moscow 127994, Russia
[3] Katholieke Univ Leuven, Dept Met & Toegepaste Mat MTM, B-3001 Louvain, Belgium
来源：
THIN SOLID FILMS | 2012年 / 520卷 / 21期
关键词：
Pulsed laser deposition; Shadow-mask; Bi-layer films; Diamond-like carbon; Tungsten-selenium-carbon; Nanostructures; Chemical state; Mechanical properties; WEAR-RESISTANT COATINGS; BUFFER GAS ATMOSPHERE; TRIBOLOGICAL PROPERTIES; THIN-FILMS; C COATINGS; AMORPHOUS-CARBON; PERFORMANCE; BEHAVIOR; VACUUM; PLUME;
D O I：
10.1016/j.tsf.2012.06.085
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Bi-layer W-Se-C/diamond-like carbon (DLC) and WSex/DLC coatings were obtained by standard and shadow-masked pulsed laser co-deposition from WSe2 and graphite targets. W-Se-C coatings appeared as nanocomposites containing quasi-amorphous WSe2, WC, spherical beta-W nanocrystalline particles encapsulated in WSe2 amorphous shell, and amorphous carbon phases. In WSex/DLC coatings, the formation of chemical bonds between W and C atoms was noticed at the interface. An increase of the C concentration over 40 at.% increases hardness and elasticity (up to 2 times at similar to 60 at.%C), and the Se/W ratio was always close to 1.4. The use of shadow-masked configuration avoids the deposition of micro-and nanoparticles. However, this method leads to a substantial increase of the Se content (Se/W >= 4), and the coatings became softer. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：6476 / 6483
页数：8
相关论文
共 32 条
  • [1] Tribological investigation of adaptive Mo2N/MoS2/Ag coatings with high sulfur content
    Aouadi, S. M.
    Paudel, Y.
    Simonson, W. J.
    Ge, Q.
    Kohli, P.
    Muratore, C.
    Voevodin, A. A.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2009, 203 (10-11) : 1304 - 1309
  • [2] About the preferential sputtering of chalcogen from transition metal dichalcogenide compounds and the determination of compound stoichiometry from XPS peak positions
    Bernède, JC
    [J]. APPLIED SURFACE SCIENCE, 2001, 171 (1-2) : 15 - 20
  • [3] Bird G., 1994, MOL GAS DYNAMICS DIR
  • [4] Fabrication of TiN thin film by shadow-masked pulsed laser deposition
    Chen, C
    Ong, PP
    Wang, H
    [J]. THIN SOLID FILMS, 2001, 382 (1-2) : 275 - 279
  • [5] Development of low friction wear-resistant coatings
    Cosemans, P
    Zhu, X
    Celis, JP
    Van Stappen, M
    [J]. SURFACE & COATINGS TECHNOLOGY, 2003, 174 : 416 - 420
  • [6] Can W-Se-C Coatings Be Competitive to W-S-C Ones?
    Evaristo, Manuel
    Polcar, Tomas
    Cavaleiro, Albano
    [J]. PLASMA PROCESSES AND POLYMERS, 2009, 6 : S92 - S95
  • [7] Synthesis and properties of W-Se-C coatings deposited by PVD in reactive and non-reactive processes
    Evaristo, Manuel
    Polcar, Tomas
    Cavaleiro, Albano
    [J]. VACUUM, 2009, 83 (10) : 1262 - 1265
  • [8] Interpretation of Raman spectra of disordered and amorphous carbon
    Ferrari, AC
    Robertson, J
    [J]. PHYSICAL REVIEW B, 2000, 61 (20) : 14095 - 14107
  • [9] Atomic mixing and chemical bond formation in MoSx/Fe thin-film system deposited from a laser plume in a high-intensity electrostatic field
    Fominski, V
    Nevolin, V
    Romanov, R
    Smirnov, A
    Titov, V
    Scharff, W
    [J]. THIN SOLID FILMS, 2002, 422 (1-2) : 39 - 47
  • [10] Pulsed laser deposition of antifriction thin-film MoSe, coatings at the different vacuum conditions
    Fominski, V. Yu.
    Romanov, R. I.
    Gusarov, A. V.
    Celis, J.-P.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2007, 201 (18) : 7813 - 7821
1234