High sensitivity anhydride hexafluorhydric acid sensor

被引：6

作者：

Blondeau-Patissier, V

Ballandras, S

Lengaigne, G

Daniau, W

Martin, G

Blind, P

Hauden, D

Nadal, MH ^{[1
]}

机构：

[1] CEA, Ctr Valduc, Dept Rech Mat Nucl, F-21120 Is Sur Tille, France

[2] Inst FEMTO ST, Dept LPMO, F-25044 Besancon, France

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2005年 / 111卷

关键词：

toxic gas sensor; anhydride hexafluorhydric (HF); love-wave;

D O I：

10.1016/j.snb.2005.06.059

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This work demonstrates the relevance of a Love-wave device dedicated to the detection of low concentrations of anhydride hexafluorhydric (HF) (C-HF < 3 ppm). Improvements are demonstrated compared to previous versions of the detection system for which surface transverse wave (STW) devices were used. We also have tested a coating, specifically sensitive to HF, deposited atop a STW resonator, operating along the same Love-wave principle and exhibiting improved sensitivity compared to STW sensors. Time-life and sensitivity of each device are reported and discussed. Finally, a surface analysis has been performed to try and explain the actual effect of HF on the sensor surface. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：219 / 224

页数：6

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