Drifting potential humps in ionization zones: The "propeller blades" of high power impulse magnetron sputtering

被引：81

作者：

Anders, Andre ^{[1
]}

Panjan, Matjaz ^{[1
,2
]}

Franz, Robert ^{[1
,3
]}

Andersson, Joakim ^{[1
,4
]}

Ni, Pavel ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA

[2] Jozef Stefan Inst, Ljubljana 1000, Slovenia

[3] Univ Leoben, A-8700 Leoben, Austria

[4] Natl Univ Singapore, Ctr Quantum Technol, Singapore 117543, Singapore

来源：

APPLIED PHYSICS LETTERS | 2013年 / 103卷 / 14期

基金：

奥地利科学基金会; 新加坡国家研究基金会;

关键词：

DISCHARGES;

D O I：

10.1063/1.4823827

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10 eV with an extended tail, as well as asymmetry with respect to E x B, where E and B are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons. (C) 2013 AIP Publishing LLC.

引用

页数：4

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