Determination of band offset in MgO/InP heterostructure by X-ray photoelectron spectroscopy

被引:10
作者
Liu, Xue [1 ]
Wang, Xiaohua [1 ]
Wang, Dengkui [1 ]
Tang, Jilong [1 ]
Fang, Xuan [1 ]
Fang, Dan [1 ]
Li, Yongfeng [2 ,3 ,4 ]
Yao, Bin [2 ,3 ,4 ]
Ma, Xiaohui [1 ]
Wang, Haizhu [1 ]
Wei, Zhipeng [1 ]
机构
[1] Changchun Univ Sci & Technol, Sch Sci, State Key Lab High Power Semicond Lasers, 7089 Wei Xing Rd, Changchun 130022, Peoples R China
[2] Jilin Univ, State Key Lab Superhard Mat, Changchun 130023, Peoples R China
[3] Jilin Univ, Coll Phys, Changchun 130023, Peoples R China
[4] Jilin Univ, Coll Phys, Key Lab Phys & Technol Adv Batteries, Minist Educ, Changchun 130012, Peoples R China
基金
中国国家自然科学基金;
关键词
MgO/InP; Thin film; Heterostructure; Band offset; Atomic layer deposition; ALIGNMENT; MGO; PHOTOLUMINESCENCE; HETEROJUNCTION; ENHANCEMENT; TRANSISTORS; VALENCE; SINX;
D O I
10.1016/j.vacuum.2016.10.012
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
X-ray photoelectron spectroscopy was used to measure the valence-band offset (Delta E-V) of MgO/InP heterostructtire. Two sets of core level pairs in the MgO/InP system were used to demonstrate the accuracy of the calculation, the Delta E-V value was the same (533 +/- 0.15 eV) when using the In 3d(3/2), Mg 2p pair and In 3d(5/2), Mg 2p pair, indicating our calculations are accuracy and reasonable. Taking the band gaps of 7.83 eV for MgO and 1.34 eV for InP into consideration, a type-I band alignment of MgO/InP heterostructure was obtained with conduction band offset (CBO) of 1.16 +/- 0.15 eV for two sets of core level pairs, indicating a nested interface band alignment heterostructure was prepared. The accurate determination of the band alignment of MgO/InP has a significant impact on the performance of InP-based devices. (C) 2016 Elsevier Ltd. All rights reserved.
引用
收藏
页码:136 / 140
页数:5
相关论文
共 28 条
[1]   Valance band offset of TiO2/CuGaO2 hetero-structure measured by x-ray photoelectron spectroscopy [J].
Ajimsha, R. S. ;
Das, Amit K. ;
Sahu, Vikas Kumar ;
Joshi, M. P. ;
Kukreja, L. M. ;
Deshpande, Uday P. ;
Shripathi, T. .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2015, 140 :446-449
[2]   Determination of MgO/GaN heterojunction band offsets by x-ray photoelectron spectroscopy [J].
Chen, JJ ;
Gila, BP ;
Hlad, M ;
Gerger, A ;
Ren, F ;
Abernathy, CR ;
Pearton, SJ .
APPLIED PHYSICS LETTERS, 2006, 88 (04) :1-3
[3]  
Chen W., 2012, ECS SOLID STATE LETT, V1, P17
[4]   Suppression of Oxygen Vacancy and Enhancement in Bias Stress Stability of High-Mobility ZnO Thin-Film Transistors with N2O Plasma Treated MgO Gate Dielectrics [J].
Chen, Wei-Yu ;
Chen, Jen-Sue ;
Jeng, Jiann-Shing .
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2013, 2 (06) :P287-P291
[5]   Electron band alignment between (100)InP and atomic-layer deposited Al2O3 [J].
Chou, Hsing-Yi ;
Afanas'ev, V. V. ;
Stesmans, A. ;
Lin, H. C. ;
Hurley, P. K. ;
Newcomb, S. B. .
APPLIED PHYSICS LETTERS, 2010, 97 (13)
[6]   Band Alignment at Molybdenum Disulphide/Boron Nitride/Aluminum Oxide Interfaces [J].
Distefano, Jennifer ;
Lin, Yu-Chuan ;
Robinson, Joshua ;
Glavin, Nicholas R. ;
Voevodin, Andrey A. ;
Brockman, Justin ;
Kuhn, Markus ;
French, Benjamin ;
King, Sean W. .
JOURNAL OF ELECTRONIC MATERIALS, 2016, 45 (02) :983-988
[7]   Band alignment of TiO2/FTO interface determined by X-ray photoelectron spectroscopy: Effect of annealing [J].
Fan, Haibo ;
Yang, Zhou ;
Ren, Xianpei ;
Yin, Mingli ;
Gao, Fei ;
Liu, Shengzhong .
AIP ADVANCES, 2016, 6 (01)
[8]   Effect of MgO on the enhancement of ultraviolet photoluminescence in ZnO [J].
Fu, Zhengping ;
Dong, Weiwei ;
Yang, Beifang ;
Wang, Zhen ;
Yang, Yingling ;
Yan, Hongwei ;
Zhang, Shuyuan ;
Zuo, Jian ;
Ma, Maosheng ;
Liu, Xianming .
SOLID STATE COMMUNICATIONS, 2006, 138 (04) :179-183
[9]   Band offsets in Sc2O3/ZnO heterostructures deposited by RF magnetron sputtering [J].
Hays, David C. ;
Gila, Brent P. ;
Pearton, Stephen J. ;
Kim, Byung-Jae ;
Ren, Fan ;
Jang, Tae Sung .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2015, 33 (05)
[10]   Valence and conduction band offsets in sputtered HfO2/InGaZnO4 heterostructures [J].
Hays, David C. ;
Gila, B. P. ;
Lambers, E. S. ;
Pearton, S. J. ;
Ren, F. .
VACUUM, 2015, 116 :60-64