共 50 条
- [1] Etching mechanism of barium strontium titanate (BST) thin films in CHF3/Ar plasma CHINESE SCIENCE BULLETIN, 2011, 56 (21): : 2267 - 2271
- [3] Inductively coupled plasma etching of BZN thin films in SF6/Ar plasmas FIFTH INTERNATIONAL CONFERENCE ON MACHINE VISION (ICMV 2012): COMPUTER VISION, IMAGE ANALYSIS AND PROCESSING, 2013, 8783
- [7] TUNABLE BARIUM STRONTIUM TITANATE THIN FILMS BY CSD ELECTROCERAMICS IN JAPAN XIII, 2010, 445 : 156 - 159