Robust roll angular error measurement system for precision machines

被引：38

作者：

Cai, Yindi ^{[1
]}

Yang, Binhe ^{[1
]}

Fan, Kuang-Chao ^{[1
]}

机构：

[1] Dalian Univ Technol, Sch Mech Engn, Dalian 116023, Peoples R China

来源：

OPTICS EXPRESS | 2019年 / 27卷 / 06期

基金：

中国国家自然科学基金;

关键词：

GEOMETRIC ERROR; LOW-COST; COMPENSATION; INTERFEROMETER;

D O I：

10.1364/OE.27.008027

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper presents a robust and low-cost roll angle measurement system (RAMS) on the basis of two parallel beams in association with two position detectors. The commonly occurring influences of beam drift, beam diameter, and intensity variations, and non parallelism of dual-beam on the roll angular error measurement of precision linear stages arc thoroughly considered and reduced. The effectiveness of the designed system and proposed methods were demonstrated by a series of experiments. It has been Verified that the designed system's measurement accuracy is within +/- 1.2 arcsec over a measurement range of 1 in. The designed system is easy to construct both in the laboratory environment and factory Field. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：8027 / 8036

页数：10

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