Characterization of bicrystalline epitaxial LaNiO3 films fabricated on MgO (100) substrates by pulsed laser deposition

被引:11
|
作者
Zheng, LA [1 ]
Zhu, J [1 ]
Zhanor, Y [1 ]
Jiang, SW [1 ]
Li, YR [1 ]
Xian, HW [1 ]
Li, JL [1 ]
机构
[1] Univ Elect Sci & Technol China, Sch Microelect & Solid State Elect, Chengdu 610054, Peoples R China
关键词
bicrystalline epitaxy; X-ray diffraction pole figure; LaNiO3; MgO;
D O I
10.1016/j.apsusc.2005.05.044
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A series of metallic LaNiO3 (LNO) thin films were deposited on MgO (1 0 0) substrates by pulsed laser deposition (PLD) under the oxygen pressure of 20 Pa at different substrate temperatures from 450 to 750 degrees C. X-ray diffraction (XRD) was used to characterize the crystal structure of LNO films. theta-2 theta scans of XRD indicate that LNO film deposited at a substrate temperature of 700 degrees C has a high orientation of (1 1 0). At other substrate temperatures, the LNO films have mixed phases of (1 1 0) and (1 0 0). Furthermore, pole figure measurements show that LNO thin films, with the bicrystalline structure, were epitaxially deposited on MgO (1 1 0) substrates in the mode of LNO (1 1 0)//MgO (1 0 0) at 700 degrees C. Reflection high-energy electric diffraction (RHEED) and atomic force microscopy (AFM) were also performed to investigate the microstructure of LNO films with the high (1 1 0) orientation. RHEED patterns clearly confirm this epitaxial relationship. An atomically smooth surface of LNO films at 700 T was obtained. In addition, bicrystalline epitaxial LNO films, fabricated at 700 T, present a excellent conductivity with a lower electrical resistivity of 300 mu Omega cm. Thus, the obtained results indicate that bicystalline epitaxial LNO films could serve as a promising candidate of electrode materials for the fabrication of ferroelectric or dielectric films. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:3609 / 3615
页数:7
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