On-axis and off-axis characterization of MWIR and LWIR Imaging Systems using Quadri Wave Interferometry

被引：1

作者：

Velghe, Sabrina ^{[1
]}

Brahmi, Djamel ^{[1
]}

Boucher, William ^{[1
]}

Wattellier, Benoit ^{[1
]}

机构：

[1] PHASICS SA, F-91128 Palaiseau, France

来源：

INFRARED IMAGING SYSTEMS: DESIGN, ANALYSIS, MODELING, AND TESTING XXIII | 2012年 / 8355卷

关键词：

Optical Metrology; Infrared; LWIR; MWIR; Wave front sensing; PSF; MTF; Field Aberration; Field curvature;

D O I：

10.1117/12.919204

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The Quadri-Wave Lateral Shearing Interferometry (QWLSI) is an innovative wave front sensing technique that is commercially available for MWIR and LWIR applications. We present this technology and its application to the metrology, on and off-axis, of infrared imaging systems. The bench is only composed of a collimated reference beam that creates a source point at infinity, the objective to analyze and the sensor placed a few millimeters after the focal spot. Thanks to this direct measurement configuration, the alignment process is very simple and fast. A complete characterization (aberrations, MTF, field curvature) for several field points is possible within a few minutes.

引用

页数：8

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