Fabrication of Division-of-focal-plane Polarizer Arrays by Electron Beam Lithography

被引：0

作者：

Yu, Miao ^{[1
]}

Cao, Liang ^{[1
]}

Li, Li ^{[1
]}

Dong, Litong ^{[1
]}

Wang, Lu ^{[1
]}

Chen, Xing ^{[1
]}

Song, Zhengxun ^{[1
]}

Weng, Zhankun ^{[1
]}

Wang, Zuobin ^{[1
]}

机构：

[1] Changchun Univ Sci & Technol, Int Res Ctr Nano Handling & Mfg China, Changchun 130022, Jilin, Peoples R China

来源：

2017 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) | 2017年

关键词：

Division-of-focal-plane; nano-wire grid; EBL; polarizer; WIRE-GRID POLARIZER; BROAD-BAND;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The division-of-focal-plane (DoFP) polarizer is used to capture polarization information in real time without rotating the polarizer. In this paper, different periods of aluminum nano-wire grids with four different orientations offset by 450 were fabricated using electron beam lithography (EBL) and inductively coupled plasma-reactive ion etching (ICP-RIE). The pitch of each unit was 7.4 mu m in a standard square. The transmission intensity measurements of DoFP arrays with different periods were performed to obtain the extinction ratios and transmission ratios which were used to evaluate the performance of grid polarizers.

引用

页码：79 / 82

页数：4

共 24 条

[1] Bilayer metal wire-grid polarizer fabricated by roll-to-roll nanoimprint lithography on flexible plastic substrate [J].