Growth and properties of ZnO films on polymeric substrate by spray pyrolysis method

被引：14

作者：

Kriisa, Merike ^{[1
]}

Kaerber, Erki ^{[1
]}

Krunks, Malle ^{[1
]}

Mikli, Valdek ^{[2
]}

Unt, Tarmo ^{[1
]}

Kukk, Mart ^{[1
]}

Mere, Arvo ^{[1
]}

机构：

[1] Tallinn Univ Technol, Dept Mat Sci, EE-19086 Tallinn, Estonia

[2] Tallinn Univ Technol, Ctr Mat Res, EE-19086 Tallinn, Estonia

来源：

THIN SOLID FILMS | 2014年 / 555卷

关键词：

ZnO; ZnO:In; Chemical spray pyrolysis; Polymeric substrate; Scrolled belts; OXIDE THIN-FILMS; ROOM-TEMPERATURE; CONDUCTING ZNO; TRANSPARENT; DEPOSITION; LAYER; THICKNESS;

D O I：

10.1016/j.tsf.2013.05.150

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The growth of ZnO layers deposited by spray pyrolysis on polymeric substrate was studied. Zinc acetate precursor solution was sprayed onto preheated polyimide (PI) and glass reference substrates at 380 degrees C. The structural, morphological, optical and electrical properties of the layers were measured by X-ray diffraction, scanning electron microscopy, optical spectroscopy and van der Pauw and Hall method. ZnO: In layers could be grown on PI when deposited onto undoped ZnO layer acting as a buffer layer on PI. Independent of the substrate type, the ZnO/ZnO: In bilayer showed a mixed morphology from smooth canvas-like surface to large scrolled belt grains dependent on buffer layer morphology. Due to the formation of scrolled belts, the ZnO: In layer shows no preferential orientation, yet the preferred orientation of the ZnO buffer crystallites is (100) plane parallel to the substrate. The bilayers deposited on PI exhibit high light scattering capability (haze factor of 85-95% in the spectral region of 350-1500 nm). The resistivity of the ZnO: In film in bilayer on PI is 4.4 x 10(-2) Omega cm mainly due to low carrier mobility of 1.5 cm(2)/Vs, the carrier concentration is 10(20) cm(-3). (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：87 / 92

页数：6

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