Oscillator based surface acoustic wave gyroscopes

被引：0

作者：

Musha, Yusuke ^{[1
]}

Hara, Motoaki ^{[1
]}

Asano, Hiroki ^{[1
]}

Kuwano, Hiroki ^{[1
]}

机构：

[1] Tohoku Univ, Grad Sch Engn, Dept Nanomech, Sendai, Miyagi, Japan

来源：

2016 IEEE 11TH ANNUAL INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2016年

关键词：

Surface acoustic wave (SAW); gyroscope; oscillator; Sensor module;

D O I：

暂无

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this paper, angular rate sensing based on surface acoustic wave (SAW) resonance was newly reported. Our sensor uses an oscillator consisted of a single SAW resonator and an amplifier. The angular rate was obtained from the change of oscillation frequency. The SAW resonator was a one-port resonator, and simply constructed by an interdigital transducer (IDT) and a pair of grating reflector. Any nanoscale scattering patterns or any complicate unidirectional IDTs (UDTs) were not included. In the demonstration, the sensitivity of 7.83x10(-3) Hz /deg.s(-1) was achieved when using the SAW resonator with the resonant frequency of 9.7 MHz. The SAW gyroscopes can detect the angular rate as the rotation axis was parallel to the SAW propagation direction. But, it did not reply when the rotation axis was orthogonal. These results agreed with theoretical predictions well.

引用

页数：4

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