A novel sol-gel thin film porous alumina based capacitive sensor for measuring trace moisture in the range of 2.5-25 ppm

被引：73

作者：

Islam, Tarikul ^{[1
]}

Kumar, Lokesh ^{[1
]}

Khan, Shakeb A. ^{[1
]}

机构：

[1] Jamia Millia Islamia, Dept Elect Engn, New Delhi 110025, India

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2012年 / 173卷

关键词：

Porous alumina; Sol-gel technique; Capacitive sensor; Moisture detector; Range; 2.5-25; ppm; HUMIDITY SENSORS;

D O I：

10.1016/j.snb.2012.07.014

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Present work deals with the development of a low cost moisture sensor for measuring moisture in the range of 2.5-25 ppm using nanoporous thin film of alumina (gamma-Al2O3). Thin film of gamma-Al2O3 prepared by low cost and simple sol-gel method offers very high surface to volume ratio with distribution of micro pores for moisture detection. Pore morphologies of the film have been studied by FESEM, AFM, XRD and BET methods. To form a capacitive sensor, the porous film of 3-6 mu m thickness was dip-coated in between two parallel gold electrodes. The characteristic of the sensors have been examined by Agilent 4294 A impedance analyzer for the frequency range of 1-20 kHz. The characteristics of the sensor can be used for making trace moisture sensor for commercial applications. The capacitance change with moisture is almost linear with 1.05% nonlinearity and 0.33% hysteresis. (c) 2012 Elsevier B.V. All rights reserved.

引用

页码：377 / 384

页数：8

共 25 条

[1]

[Anonymous], 1985, DAT SHEET HONN SENS

[2]

[Anonymous], 1980, DAT SHEET XENT CORP

[3]

[Anonymous], 2008, 13691 AG TECHN

[4] Pore size optimisation of humidity sensor - a probabilistic approach [J].

Banerjee, G ;

Sengupta, K .

SENSORS AND ACTUATORS B-CHEMICAL, 2002, 86 (01) :34-41

[5]

Brinker C. J., 2013, SOL GEL SCI PHYS CHE, DOI [DOI 10.1016/B978-0-08-057103-4.50001-5, 10.1016/C2009-0-22386-5]

[6] Humidity sensors: A review of materials and mechanisms [J].

Chen, Z ;

Lu, C .

SENSOR LETTERS, 2005, 3 (04) :274-295

[7] Micromachined Water Vapor Sensors: A Review of Sensing Technologies [J].

Fenner, Ralph ;

Zdankiewicz, Edward .

IEEE SENSORS JOURNAL, 2001, 1 (04) :309-317

[8]

Golding Widdies, 2009, ELECT MEASUREMENTS M

[9]

Islam T., 2011, PHYS STATUS SOLIDI A, P1

[10] Sol-gel fabrication of compact, crack-free alumina film [J].

Jing, Chengbin ;

Zhao, Xiujian ;

Zhang, Yongheng .

MATERIALS RESEARCH BULLETIN, 2007, 42 (04) :600-608

← 1 2 3 →