Electric degradation behavior of hot filament in diamond chemical vapor deposition

被引：0
|
作者：
Chen, GC [1 ]
Huang, RF [1 ]
Wen, LS [1 ]
机构：
[1] Acad Sinica, Inst Met Res, Shenyang 110015, Peoples R China
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1999年 / 17卷 / 05期
关键词：
D O I：
10.1116/1.582029
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
[No abstract available]
引用
收藏
页码：3108 / 3110
页数：3
相关论文
共 50 条
  • [21] THE EFFECT OF THE CHANGE IN FILAMENT CHARACTERISTICS ON DIAMOND GROWTH IN HOT FILAMENT CHEMICAL VAPOR-DEPOSITION
    KWEON, DW
    LEE, JY
    MATERIALS RESEARCH BULLETIN, 1992, 27 (06) : 783 - 791
  • [22] Influence of nitrogen additions on hot-filament chemical vapor deposition of diamond
    Bohr, S
    Haubner, R
    Lux, B
    APPLIED PHYSICS LETTERS, 1996, 68 (08) : 1075 - 1077
  • [23] THE MORPHOLOGY OF DIAMOND SYNTHESIZED BY HOT-FILAMENT CHEMICAL VAPOR-DEPOSITION
    KWEON, DW
    LEE, JY
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1992, 11 (15) : 1043 - 1045
  • [24] Selective growth of diamond and carbon nanostructures by hot filament chemical vapor deposition
    Yang, Q
    Xiao, C
    Chen, W
    Hirose, A
    DIAMOND AND RELATED MATERIALS, 2004, 13 (03) : 433 - 437
  • [25] Doping of vanadium to nanocrystalline diamond films by hot filament chemical vapor deposition
    Zhang, Yaozhong
    Zhang, Liying
    Zhao, Jiang
    Wang, Liang
    Zhao, Gang
    Zhang, Yafei
    NANOSCALE RESEARCH LETTERS, 2012, 7
  • [26] A study of diamond synthesis by hot filament chemical vapor deposition on Nc coatings
    R. Polini
    S. Kumashiro
    M. J. Jackson
    M. Amar
    W. Ahmed
    H. Sein
    Journal of Materials Engineering and Performance, 2006, 15 : 218 - 222
  • [27] Epitaxially oriented growth of diamond on silicon by hot filament chemical vapor deposition
    Chen, QJ
    Wang, LX
    Zhang, Z
    Yang, J
    Lin, ZD
    APPLIED PHYSICS LETTERS, 1996, 68 (02) : 176 - 178
  • [28] Nucleation of diamond on Si cones by biased hot filament chemical vapor deposition
    Wang, WL
    Liao, KJ
    Wang, SX
    Xiao, JL
    DIAMOND MATERIALS VI, 2000, 99 (32): : 120 - 125
  • [29] Diamond nucleation with dynamic magnetic field in hot filament chemical vapor deposition
    Liu, Xuezhang
    Wen, Kui
    Duan, Xiaohua
    Wang, Caihua
    Long, Hangyu
    VACUUM, 2023, 218
  • [30] Influence of nitrogen additions on hot-filament chemical vapor deposition of diamond
    Appl Phys Lett, 8 (1075):
12345