Extreme adaptive optics testbed: Performance and characterization of a 1024-MEMS deformable mirror

被引：9

作者：

Evans, Julia W. ^{[1
,2
]}

Morzinski, Katie ^{[3
]}

Severson, Scott ^{[3
]}

Poyneer, Lisa ^{[1
]}

Macintosh, Bruce ^{[1
,3
]}

Dillon, Daren ^{[3
]}

Reza, Layra ^{[3
,4
]}

Gavel, Donald ^{[3
]}

Palmer, David ^{[1
]}

Olivier, Scot ^{[1
]}

Bierden, Paul ^{[5
]}

机构：

[1] Lawrence Livermore Natl Lab, 7000 E Ave, Livermore, CA 94550 USA

[2] Univ Calif Davis, Davis, CA 95616 USA

[3] Univ Calif Santa Cruz, Santa Cruz, CA 95064 USA

[4] Univ Texas El Paso, El Paso, TX 79968 USA

[5] Boston Micromachines Corp, Watertown, MA 02472 USA

来源：

MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS III | 2006年 / 6113卷

基金：

美国国家科学基金会;

关键词：

adaptive optics; MEMS; extreme adaptive optics;

D O I：

10.1117/12.648977

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have demonstrated that a microelectrical mechanical systems (MEMS) deformable mirror can be flattened to < 1nm RMS within controllable spatial frequencies over a 9.2-mm aperture making it a viable option for high-contrast adaptive optics systems (also known as Extreme Adaptive Optics). The Extreme Adaptive Optics Testbed at UC Santa Cruz is being used to investigate and develop technologies for high-contrast imaging, especially wavefront control. A phase shifting diffraction interferometer (PSDI) measures wavefront errors with sub-nm precision and accuracy for metrology and wavefront control. Consistent flattening, required testing and characterization of the individual actuator response, including the effects of dead and low-response actuators. Stability and repeatability of the MEMS devices was also tested. An error budget for MEMS closed loop performance will summarize MEMS characterization.

引用

页数：6

共 7 条

[1] Micromachined deformable mirrors for dynamic wavefront control [J].

Bifano, T ;

Bierden, P ;

Perreault, J .

ADVANCED WAVEFRONT CONTROL: METHODS, DEVICES, AND APPLICATIONS II, 2004, 5553 :1-16

[2]

Evans J. W., 2005, P SOC PHOTO-OPT INS, V5905, P303

[3]

EVANS JW, 2005, UNPUB OPTICS LETT

[4]

KASDIN NJ, ASTROPHYSICAL J, V582, P1147

[5]

Macintosh B. A., 2002, Proceedings of the SPIE - The International Society for Optical Engineering, V4494, P60, DOI 10.1117/12.454815

[6] Anodic oxidation and reliability of MEMS poly-silicon electrodes at high relative humidity and high voltages [J].

Shea, HR ;

Gasparyan, A ;

White, CD ;

Comizzoli, RB ;

Abusch-Magder, D ;

Arney, S .

MEMS RELIABILITY FOR CRITICAL APPLICATIONS, 2000, 4180 :117-122

[7] 100-picometer interferometry for EUVL [J].

Sommargren, GE ;

Phillion, DW ;

Johnson, MA ;

Nguyen, NQ ;

Barty, A ;

Snell, FJ ;

Dillon, DR ;

Bradsher, LS .

EMERGING LITHOGRAPHIC TECHNOLOGIES VI, PTS 1 AND 2, 2002, 4688 :316-328

← 1 →