Optimal shape design of electrostatic microactuators: A multiobjective formulation

A procedure of automated optimal design of a class of micro-electromechanical devices is proposed in terms of a multiobjective optimization formulation. A comb-drive electrostatic accelerometer is considered as the case study. By optimizing the shape design of the device, it is desired to extend the actuation range of the comb drive in steady-state conditions, leading to greater gap distances between the electrodes. The design variables control the geometry of fixed and movable electrodes, in terms of width and height. The twofold goal of maximizing the drive force considered as the main criterion, while minimizing the levitation force considered as a parasitic effect, makes it possible to implement a Pareto optimality approach.