Nanorobotic Strategies for Handling and Characterization of Metal-Assisted Etched Silicon Nanowires

被引：1

作者：

Stolle, Christian ^{[1
]}

Bartenwerfer, Malte ^{[1
]}

Celle, Caroline ^{[2
]}

Simonato, Jean-Pierre ^{[2
]}

Fatikow, Sergej ^{[1
,3
]}

机构：

[1] Carl von Ossietzky Univ Oldenburg, Div Microrobot & Control Engn, D-26129 Oldenburg, Germany

[2] CEA Grenoble, F-38054 Grenoble, France

[3] Carl von Ossietzky Univ Oldenburg, Dept Comp Sci, D-26129 Oldenburg, Germany

来源：

IEEE-ASME TRANSACTIONS ON MECHATRONICS | 2013年 / 18卷 / 03期

关键词：

Electrical characterization; handling strategies; material characterization; nanorobotics; silicon-nanowires; CARBON NANOTUBES; ELECTRON-BEAM; NANOSTRUCTURES; NANOSCALE; SYSTEMS; BLOCK;

D O I：

10.1109/TMECH.2012.2193591

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper gives insight into nanorobotic handling and electrical characterization of silicon nanowires (SiNWs) inside a scanning electron microscope. The synthesis of metal-assisted etched both end doped SiNWs is presented. Several nanorobotic pick and place strategies for handling individual nanowires are discussed. Key approaches such as force-based and adhesive bonding (focus ion and electron beam induced deposition) have been realized experimentally and evaluated toward their suitability for automation. Preliminary results on electrical characterization are presented.

引用

页码：887 / 894

页数：8

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