Effect of Annealing Temperature on the Mechanical Properties of Bi3.15(Eu0.7Nd0.15)Ti3O12 Ferroelectric Thin Films

被引：2

作者：

Jiang Da-Dong ^{[1
]}

Zheng Xue-Jun ^{[1
]}

Gong Yue-Qiu ^{[1
]}

Zhu-Zhe ^{[1
]}

Peng Jin-Feng ^{[1
]}

机构：

[1] Xiangtan Univ, Fac Mat & Optoelect Phys, Xiangtan 411105, Peoples R China

来源：

JOURNAL OF INORGANIC MATERIALS | 2013年 / 28卷 / 02期

基金：

中国国家自然科学基金;

关键词：

elastic modulus; hardness; residual stress; annealing temperature;

D O I：

10.3724/SP.J.1077.2013.12201

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Bi-3.15(Eu0.7Nd0.15)Ti3O12 (BENT) thin films were deposited on Pt/Ti/SiO2/Si(111) substrates via metal-organic decomposition (MOD) and annealed at 600 degrees C, 650 degrees C, 700 degrees C and 750 degrees C. The hardness and elastic modulus were measured by nanoindentation, and the residual stress was measured by X-ray diffraction (XRD). The grain sizes of the BENT thin films increase with the annealing temperatures increasing. With the grain size increasing from 37 nm to 46 nm, the hardness decreases from 8.4 GPa to 3.1 GPa and the elastic modulus decreases from 171.5 GPa to 141.6 GPa. While the annealing temperature increases from 600 degrees C to 750 degrees C, the residual stress decreases from -743 MPa to -530 MPa. The BENT thin film annealed at 600 degrees C shows the largest hardness and elastic modulus.

引用

页码：131 / 135

页数：5

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