Sputtering growth of Ni-Ti shape memory alloy nano fibers on porous alumina membrane

被引:2
|
作者
Kato, Hiroyuki [1 ]
Hino, Junpei [1 ]
Sasaki, Kazuaki [1 ]
Inoue, Shozo [2 ]
机构
[1] Hokkaido Univ, Div Mech & Space Engn, Sapporo, Hokkaido 0608628, Japan
[2] Univ Hyogo, Dept Mech & Syst Engn, Himeji, Hyogo 6712280, Japan
关键词
Sputtering; Ni-Ti; Shape memory alloy; Nanofabrication; THIN-FILM; STRESS; TRANSFORMATION; FABRICATION; BEHAVIOR; STRAIN;
D O I
10.1016/j.jallcom.2012.02.042
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A novel method of preparing a large number of fiber-shaped Ni-Ti nano crystals with medium aspect ratio in the order of 10 was examined. A target of nickel-titanium shape memory alloy was sputter-deposited on a porous alumina membrane having holes with 200 nm diameter in average. The porous geometry of the substrate caused the growth of columnar structure under the sputtering conditions, the argon gas pressure of 0.2 Pa and the substrate temperature of 2500 degrees C, which would provide homogeneous alloy films, if the surface of substrate was flat. The columnar structure thus obtained was the assemble of isolated columns which were weakly adhered with each others, and could be separated into individual ones by applying ultrasonic vibration. Each column had a fibrous shape of diameter about 200 nm and 2.5 mu m long (the aspect ratio was 12.5). The crystals can exhibit both martensitic transformation and the R-phase change with the total amount of latent heat 18 J g(-1), indicating that 75% of the nano crystals was active to these transformations. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:S222 / S226
页数:5
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