Injection MOCVD of BaTiO3/SrTiO3 artificial superlattices

in this paper we report on the deposition of BST films and BaTiO3/SrTiO3 superlattices (BTOISTO) obtained by injection MOCVD. In a first time, BST films were deposited on various substrates such as LaAlO3(LAO), SrTiO3:Nb(STO:Nb) and Al2O,(0001), resulting in epitaxial films in the case of STO or LAO substrates and highly textured films in the case of Al2O3 substrates. The good crystallinity of the films obtained was evidenced using X-ray analysis. Concerning the dielectric properties of the BST films deposited on STO:Nb one can mention that the T-c values were found to be the same as those for bulk materials. Furthermore, the feasibility of BTO/STO multilayers on Al2O3 (0001) was investigated. The grown superlattices were (111) oriented, displaying good crystallinity.