A new strip line broad-band measurement evaluation for determining the complex permeability of thin ferromagnetic films

被引：158

作者：

Bekker, V ^{[1
]}

Seemann, K ^{[1
]}

Leiste, H ^{[1
]}

机构：

[1] Forschungszentrum Karlsruhe, Inst Mat Forsch, D-76344 Eggenstein Leopoltshafen, Germany

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2004年 / 270卷 / 03期

关键词：

thin films; strip line technique; high frequency permeability;

D O I：

10.1016/j.jmmm.2003.08.033

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In the present paper, a new method for determining the frequency dependent complex permeability of thin magnetic films, designed for measurements up to 5 GHz, is presented. The measurement technique described here was carried out by a one-port permeameter, which is based on a short-circuited strip line. The complex permeability was deduced by a new analytical approach from the measured reflection coefficient of a strip line (Si 1) with and without a ferromagnetic film material inside. An adaptive error correction was applied in the measurement procedure. The spectral permeability of thin FeCoAlN films with an in-plane uniaxial anisotropy of mu(0)*H-a = 3.2 mT induced by annealing at CMOS temperatures in a static magnetic field was investigated. The measurements were compared with a theoretical model taking the Landau-Lifshitz and eddy current theories into account. A resonant frequency of about 1.6 GHz was observed. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：327 / 332

页数：6

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