Sheath formation in low-pressure discharges, the Bohm criterion and the consequences of collisions

被引:21
|
作者
Valentini, H-B [1 ]
Kaiser, D. [1 ]
机构
[1] Univ Jena, D-07743 Jena, Germany
来源
PLASMA SOURCES SCIENCE & TECHNOLOGY | 2014年 / 23卷 / 01期
关键词
POSITIVE-COLUMN; ACTIVE PLASMA; TRANSITION;
D O I
10.1088/0963-0252/23/1/015004
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The space charge density in low-pressure discharges results from the generation of charged particles, the momentum transfer from these particles to the neutral gas and the electric field. A simplified model is used to treat this process analytically and numerically across the whole plasma. The effect of the electric field alone can cause the formation of the space charge sheath if the ion drift velocity nu(i) to the wall exceeds the modified Bohm velocity nu C = nu(B) x (n(i)/n(e))(1/2), where nu(B) is the Bohm velocity and ni and ne are the number densities of the ions and the electrons, respectively. However, a domain with nu(i) >= nu(C) can occur only if the effect of collisions is weak. This domain is very narrow and does not come up to the wall. Limits of the electric field strength determining the sheath formation are given. It is shown that the electric field strength cannot be set equal to zero at nu(i) = nu(B) or nu(C) under collisional conditions. The sheath extends from the region near the wall towards the centre and a result of that is to lower nu(i) with respect to nu(B) as the collisionality rises. These results are used to take into consideration various sheath criteria. The Bohm criterion takes into account the effect of the electric field only and reveals a well-defined sheath edge at nu(i) = nu(B). This criterion remains a useful approximation of the sheath edge in almost collisionless plasmas as well. Under collisional conditions the definition of the sheath edge becomes more difficult and a little arbitrary. This paper takes into account new sheath criteria modified for the case of finite collisionality. The divergence between the densities of the ions and the electrons, the gradients of the space charge density and of the generalized Bohm speed nu(C) are studied as functions of.i or the distance from the wall. These criteria are compared with the collisionally modified Bohm criteria proposed by Godyak
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页数:10
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