Electrical characterization of the Au/InP(100) and Au/InSb/InP(100) structures

被引:29
作者
Akkal, B [1 ]
Benamara, Z
Bideux, L
Gruzza, B
机构
[1] Univ Djillali Liabes, Lab Microelectron Appl, Sidi Bel Abbes 22000, Algeria
[2] Univ Clermont Ferrand 2, Lab Sci Mat Electron & Automat, F-63177 Clermont Ferrand, France
关键词
interfacial state density; current-voltage; capacitance-voltage;
D O I
10.1016/S0026-2692(99)00009-9
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we measure the current-voltage (I-V) and the capacitance-voltage (C-V) characteristics of the Au/InP(100) and Au/InSb/InP(100) Schottky type diodes. The InP(n) substrate is restructured by some monolayers of the InSb thin film, We then propose a study of the electrical quality of the elaborated components after the Au/InP interface creation; first without annealing and then after annealing by heating at 500 degrees C temperatures. Analysis of the measured I(V) characteristics for the Au/InP and Au/InSb/InP samples allows the determination of the electrical parameter variations. The saturation current I-s, the serial resistance R-s, the mean ideality factor n and also the barrier height phi(Bn), are respectively equal to 2.10 X 10(-4) A, 19 Ohm, 1.8 and 0.401 eV for the Au/InP sample and equal to 1.34 x 10(-7) A 175 Ohm, 1.78 and 6592 eV for the Au/heated InSb/InP, Another good result is that the analysis and simulation of the I(V) and the C(V) characteristics allows us to determine the very important mean interfacial state density N-ss(mean), and is obtained to be equal 4.23 X 10(12) eV(-1) cm(-2) for the Au/InP sample and equal to 4.42 X 10(12) eV(-1) cm(-2) for the Au/heated InSb/InP. This work thus permits the evolution study of these electrical parameters related to the restructuration conditions. (C) 1999 Elsevier Science Ltd. All rights reserved.
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页码:673 / 678
页数:6
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